INELASTIC GRAZING COLLISIONS OF FAST ATOMIC PARTICLES WITH METALLIC SURFACES E.A.Andreev $^\ast$, M.Y.Knignikov$^\ast$ $^\ast$ N.N.Semenov Institute of Chemical Physics, Russian Academy of Sciences,Kosygin str. 4, Moscow 117977, Russia The peculiarities of interaction and energy exchange of fast atomic particles (E=1-10 keV) scattered from metallic surfaces under small angles (1-5 deg.) have been revealed and investigated. The basis of the theory of fast atomic particles grazing collisions with solid surfaces have been created.