Multiple ionization in M, N and O-shell in heavy atoms by O, Si and S = ions D. Banas^1, J. Braziewicz^1, T. Czyzewski^2, M. Jaskola^2, W. = Kretschmer^3, A. Kubala-Kukus^1, U. Majewska^1, T. Mukoyama^4, M. Pajek^1 and J. = Semaniak^1 1) Institute of Physics, Pedagogical University, 25-405 Kielce, Poland 2) Soltan Institute for Nuclear Studies, 05-400 Otwock-Swierk, Poland 3) Physikalisches Institut, Universitat Erlangen-Nunberg, D-91058 = Erlangen, Germany 4) Institute for Chemical Research, Kyoto University, Uji, Kyoto 606, = japan Multiple ionization in M, N and O-shell of selected heavy atoms by = impact of 0.5-2 MeV/amu O, Si and S ions are derived from the measured = L_gamma x-ray transitions. The data are compared with the predictions of = the "geometrical model" of multiple ionization in ion-atom collsions. = The vacancy raarrangementt processes are found to play important role = for N-shell, while for the O-shell additionally the solid state effects = are observed.