EMISSION INTENSITY OF THE RESONANCE LINE OF Al ATOM SPUTTED FROM AN OXYGEN COVERED Al SURFACE WITH 40KeV Ar+ BOMBARDMENT
T. Nimura, R.Wada, and S.Tsurubuchi
Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo 184-8588, Japan
The degree of quantum tunneling of an electron between an excited Al atom and metal surface depends strongly on the surface condition.
In the present work, the steady state oxygen coverage of target surface was deduced by observing intensity variation of the resonance line of Al atoms sputtered from a polycrystalline Al surface with 40keV Ar+ ions.